IEEE Transducers 2007

IEEE Transducers, Lyon, France, June 2007.
Title: A CMOS Microsystem Combining Magnetic Actuation and In-Situ Optical Detection of Microparticles
Authors: U. Lehmann, M. Sergio, S. Pietrocola, C. Niclass, E. Charbon, and M.A.M. Gijs
Event/Journal